Abstract
This paper illustrates the extension of Rayleigh wave based surface acoustic wave (SAW) device sensors previously developed by the authors to integration with microfluidics. The SAW device is first modeled with a microchannel and then analyzed using finite element method. Precise fabrication, alignment and bonding of polydimethylsiloxane (PDMS) microchannels on diced Y-Z lithium niobate substrates are accomplished. Low glycerin concentrations in deionized (DI) water are analyzed. Simulation results and vector network analyzer (VNA) measurements of the device with the microchannel integration are given. With new microchannel integrated SAW device, sensitivity of -0.53 (% glycerin) is achieved at peak frequency of 86.1 MHz. Minimum signal-to-noise ratio is found as 7.51 dB.