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Magnetostrictively deforming the surface of a silicon wafer at two locations
Conference proceeding

Magnetostrictively deforming the surface of a silicon wafer at two locations

M. P Ulmer, R Coppejans, M. A Khreishi, K Keely, D. B Buchholz, R Shiri, L. A Rodriguez, A. E O'Donnell, Z. J Schonfeld, W. H Reinhardt, …
Proceedings of SPIE - The International Society for Optical Engineering, Vol.10761, pp.107610B-107610B-9
2018-09-18

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