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Dual step EBL Gate fabrication technology for GaN-HEMT wideband applications
Journal article   Peer reviewed

Dual step EBL Gate fabrication technology for GaN-HEMT wideband applications

D Dominijanni, E Giovine, A Notargiacomo, A Pantellini, P Romanini, M Peroni and A Nanni
Microelectronic engineering, Vol.88(8), pp.1927-1930
2011-08

Abstract

High electron mobility transistor (HEMT) Microwave monolithic integrated circuits (MMICs) Electron beam lithography (EBL) T-Gate

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Collaboration types
Industry collaboration
Domestic collaboration
Citation topics
5 Physics
5.33 Semiconductor Physics
5.33.75 GaN
Web Of Science research areas
Engineering, Electrical & Electronic
Nanoscience & Nanotechnology
Optics
Physics, Applied
ESI research areas
Engineering

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