Abstract
Electrochemical vials with volumes of 2.6 nL and embedded working and reference electrodes have been fabricated by coupling screen‐printing (thick‐film) technology with excimer laser micromachining. The processing parameters were varied to determine their effect on the resulting nanocell. The fabricated systems were analyzed by resistance measurements, surface profilometry, and SEM. The performance of the electrochemical nanovials was evaluated by cyclic voltammetry using hexaamineruthenium(III) chloride. The current limits of thick‐film fabrication were approached in creating very small nanocells using the methods described. The functioning small volume electrochemical cells gave voltammograms that were either peak‐shaped or sigmoidal. The shape of the voltammogram corresponded to the electrochemical surface area determined by chronoamperometry.
