Fabrication process responsible for fundamentally improving Silicon X-ray microcalorimeter arrays

R.P Brekosky; C.A Allen; M Galeazzi; J.D Gygax; H Isenburg; R.L Kelley; D McCammon; R.A McClanahan; F.S Porter; C.K Stahle; A.E Szymkowiak

doi:10.1016/j.nima.2003.11.358

Journal article

Fabrication process responsible for fundamentally improving Silicon X-ray microcalorimeter arrays

R.P Brekosky, C.A Allen, M Galeazzi, J.D Gygax, H Isenburg, R.L Kelley, D McCammon, R.A McClanahan, F.S Porter, C.K Stahle, …

Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, Vol.520(1-3), pp.439-442

2004-03-11

DOI: https://doi.org/10.1016/j.nima.2003.11.358

Abstract

Fabrication

Array

XRS

Microcalorimeter

Pixel

Astro-E2

We have developed an improved microcalorimeter array that will be used on the AstroE-2 satellite mission. The 6×6 array consists of a grid of 36 suspended pixels. Each 1.5μm thick pixel has an ion-implanted thermometer, four thermal links (support beams), and four X-ray absorber support tabs. Improvements in Silicon micro-machining capabilities and the availability of custom Silicon-on-Insulator (SOI) wafers has enabled us to precisely control pixel geometry, lead widths, and develop a more compact array. Knowing the silicon thickness, we can calculate a precise implant dose for the thermometer. Using a high-temperature anneal, we can uniformly diffuse the implant throughout the depth of the top layer of the SOI wafer. Defining the length, width, and thickness of the support beams, we can control the thermal conductance of the pixel. Advancements in polymer-photo resists have enabled us to develop a new absorber support tab attachment scheme resulting in more controlled heat dissipation from the absorber to the thermometer on the pixel. An overview of fabrication improvements focusing on these topics will be discussed.

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Collaboration types: Domestic collaboration
Citation topics: 5 Physics; 5.30 Superconductor Science; 5.30.929 Josephson Junctions
Web Of Science research areas: Instruments & Instrumentation; Nuclear Science & Technology; Physics, Nuclear; Physics, Particles & Fields
ESI research areas: Physics

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Details

Title: Fabrication process responsible for fundamentally improving Silicon X-ray microcalorimeter arrays
Creators: R.P Brekosky - Swales Aerospace, Beltsville, MD 20705, USA
C.A Allen - Laboratory for High Energy Astrophysics, Goddard Space Flight Center, Greenbelt, MD 20771, USA
M Galeazzi - Department of Physics, University of Miami, Coral Gables, FL 33146, USA
J.D Gygax - Swales Aerospace, Beltsville, MD 20705, USA
H Isenburg - Laboratory for High Energy Astrophysics, Goddard Space Flight Center, Greenbelt, MD 20771, USA
R.L Kelley - Laboratory for High Energy Astrophysics, Goddard Space Flight Center, Greenbelt, MD 20771, USA
D McCammon - Department of Physics, University of Wisconsin, Madison, WI 53706, USA
R.A McClanahan - Laboratory for High Energy Astrophysics, Goddard Space Flight Center, Greenbelt, MD 20771, USA
F.S Porter - Laboratory for High Energy Astrophysics, Goddard Space Flight Center, Greenbelt, MD 20771, USA
C.K Stahle - Laboratory for High Energy Astrophysics, Goddard Space Flight Center, Greenbelt, MD 20771, USA
A.E Szymkowiak - Department of Physics, Yale University, New Haven, CT 06520, USA
Publication Details: Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, Vol.520(1-3), pp.439-442
Publisher: Elsevier B.V
Academic Unit: College of A&S; A&S - Physics
Language: English
Resource Type: Journal article
Record Identifier: 991031577798202976