Finite Element Modeling and Analysis of Surface Acoustic Wave Devices in CMOS Technology

Journal article

Peer reviewed

Onur TIGLI and Mona Elwakkad ZAGHLOUL

IEEE transactions on components, packaging, and manufacturing technology (2011), Vol.2(5-6), pp.1021-1029

2012

Abstract

Integrated circuits

Micro- and nanoelectromechanical devices (mems/nems)

Exact sciences and technology

Electronics

Applied sciences

Design. Technologies. Operation analysis. Testing

Acoustic wave devices, piezoelectric and piezoresistive devices

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

17 Record Views

These are selected metrics from InCites Benchmarking & Analytics tool, related to this output

Collaboration types: Domestic collaboration
Citation topics: 7 Engineering & Materials Science; 7.226 Electrical - Sensors & Monitoring; 7.226.1005 Surface Acoustic Wave
Web Of Science research areas: Engineering, Electrical & Electronic; Engineering, Manufacturing; Materials Science, Multidisciplinary
ESI research areas: Engineering

This output has contributed to the advancement of the following goals:

Source: InCites

Title: Finite Element Modeling and Analysis of Surface Acoustic Wave Devices in CMOS Technology
Creators: Onur TIGLI - Electrical and Computer Engineering Department, University of Miami, Coral Gables, FL 33146, United States
Mona Elwakkad ZAGHLOUL - Electrical and Computer Engineering Department, George Washington University, Washington, DC 20012, United States
Publication Details: IEEE transactions on components, packaging, and manufacturing technology (2011), Vol.2(5-6), pp.1021-1029
Publisher: Institute of Electrical and Electronics Engineers; Piscataway, NJ
Academic Unit: College of Engineering; CoE - Electrical & Computer Engineering
Language: English
Resource Type: Journal article
Record Identifier: 991031559695702976