- Title
- Hard-tip, soft-spring lithography
- Creators
- Wooyoung Shim - Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United StatesAdam B Braunschweig - International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United StatesXING Liao - Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United StatesJINAN Chai - International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United StatesJONG KUK Lim - International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United StatesGENGFENG Zheng - International Institute for Nanotechnology, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, United StatesChad A Mirkin - Department of Materials Science and Engineering, Northwestern University, 2220 Campus Drive, Evanston, Illinois 60208, United States
- Publication Details
- Nature (London), Vol.469(7331), pp.516-520
- Publisher
- Nature Publishing Group
- Language
- English
- Resource Type
- Journal article
- PMID
- 21270890
- Record Identifier
- 991031613930802976
Journal article
Hard-tip, soft-spring lithography
Nature (London), Vol.469(7331), pp.516-520
2011
PMID: 21270890
Metrics
4 Record Views
InCites Highlights
These are selected metrics from InCites Benchmarking & Analytics tool, related to this output
- Citation topics
- 2 Chemistry
- 2.167 Microelectromechanical Systems
- 2.167.305 Self-Assembled Monolayers
- Web Of Science research areas
- Physics, Applied
- ESI research areas
- Multidisciplinary
UN Sustainable Development Goals (SDGs)
This output has contributed to the advancement of the following goals:
Source: InCites