Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication

$Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication$

Journal article

Peer reviewed

Applied Optics, Vol.37(32), pp.7568-7576

1998-11-10

PMID: 18301593

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Citation topics: 2 Chemistry; 2.160 Microfluidic Devices & Superhydrophobicity; 2.160.174 Microfluidics
Web Of Science research areas: Optics
ESI research areas: Physics

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Title: Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication
Creators: Michael R Wang
Heng Su
Publication Details: Applied Optics, Vol.37(32), pp.7568-7576
Academic Unit: College of Engineering; CoE - Electrical & Computer Engineering
Language: English
Resource Type: Journal article
PMID: 18301593
Record Identifier: 991031562802502976