Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass

$Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass$

Journal article

Peer reviewed

Optics letters, Vol.23(11), pp.876-878

1998-06-01

PMID: 18087371

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Citation topics: 2 Chemistry; 2.160 Microfluidic Devices & Superhydrophobicity; 2.160.174 Microfluidics
Web Of Science research areas: Optics
ESI research areas: Physics

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Title: Multilevel diffractive microlens fabrication by one-step laser-assisted chemical etching upon high-energy-beam sensitive glass
Creators: Michael R Wang
Heng Su
Publication Details: Optics letters, Vol.23(11), pp.876-878
Academic Unit: College of Engineering; CoE - Electrical & Computer Engineering
Language: English
Resource Type: Journal article
PMID: 18087371
Record Identifier: 991031560931502976