Polynomial solution for two thicknesses of a multilayer system from a single ellipsometric measurement

Journal article

Stoyan C Russev, Jean-Pierre Drolet, Daniel Ducharme, Iliana Mircheva and Roger M Leblanc

Journal of the Optical Society of America. A, Optics, image science, and vision, Vol.13(1), pp.152-157

1996-01-01

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Collaboration types: Domestic collaboration; International collaboration
Citation topics: 5 Physics; 5.250 Imaging & Tomography; 5.250.1576 Mueller Matrix
Web Of Science research areas: Optics
ESI research areas: Physics

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Title: Polynomial solution for two thicknesses of a multilayer system from a single ellipsometric measurement
Creators: Stoyan C Russev
Jean-Pierre Drolet
Daniel Ducharme
Iliana Mircheva
Roger M Leblanc
Publication Details: Journal of the Optical Society of America. A, Optics, image science, and vision, Vol.13(1), pp.152-157
Academic Unit: Leadership Department; College of A&S; A&S - Chemistry
Language: English
Resource Type: Journal article
Record Identifier: 991031576509402976